| Home | E-Submission/Review | Sitemap | Editorial Office |  
top_img
Author Index > Browse Articles > Author Index

Author is indexed since 2016

Author :
Young-Hwan Choi 1 Article
824 Effect of Ion Flux Variation in DC Magnetron Sputtering on the Deposition of Cubic Boron Nitride Film
DC 마그네트론 스퍼터링에서 입방정 질화붕소 박막의 증착 거동에 미치는 이온 플럭스 변화의 영향
Young-Hwan Choi, Joo-Youl Huh, Young-Joon Baik
최영환, 허주열, 백영준
Korean J. Met. Mater. 2023;61(11):824-829.   Published online 2023 Oct 29
DOI: https://doi.org/10.3365/KJMM.2023.61.11.824

Abstract
Cubic boron nitride (cBN) thin films were deposited using DC magnetron sputtering, and the effect of the ion flux on the deposition behavior and residual stress of the cBN thin films was investigated. To increase the ion flux, the magnetic force ratio of the central/peripheral permanent magnets inserted in the..... More

                
E-Submission
Email Alert
Author's Index
Specialties
Journal Impact Factor 1.2
The Korean Institute of Metals and Materials
SCImago Journal & Country Rank
Scopus
GoogleScholar
Similarity Check
Crossref Cited-by Linking
KOFST
COPE
Editorial Office
The Korean Institute of Metals and Materials
6th Fl., Seocho-daero 56-gil 38, Seocho-gu, Seoul 06633, Korea
TEL: +82-2-557-1071   FAX: +82-2-557-1080   E-mail: metal@kim.or.kr
About |  Browse Articles |  Current Issue |  For Authors and Reviewers
Copyright © The Korean Institute of Metals and Materials.                 Developed in M2PI