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Measurement of Intrinsic Hardness of Deposited Chromium Thin Films by Nanoindentation Method and Influencing Factors
나노인덴테이션 방법으로 크롬 박막의 고유경도를 측정하는 방법과 영향 인자
Young-Joon Kang, Ju-Hwan Baeg, Hyun Park, Young-Rae Cho
강영준, 백주환, 박현, 조영래
Korean J. Met. Mater. 2020;58(3):207-215.   Published online 2020 Mar 5
DOI: https://doi.org/10.3365/KJMM.2020.58.3.207

Abstract
Materials with very small dimensions exhibit different physical and mechanical properties compared to their bulk counterparts. This becomes significantly important for the thin films that are widely used as components in micro-electronics and functional materials. In this study, a chromium (Cr) thin film was deposited on a silicon (Si) wafer..... More

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