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Simultaneous Improvement in the Corrosion Resistance and Visible Transparency of ZnO/Cu/ZnO Transparent Heaters with Reactively Sputtered Al<sub>2</sub>O<sub>3</sub> Layers
반응성 스퍼터링법으로 제조된 Al2O3 막을 이용한 ZnO/Cu/ZnO 투명 히터의 내식성과 투과도 개선 연구
Geumhyuck Bang, Dooho Choi
방금혁, 최두호
Korean J. Met. Mater. 2021;59(3):155-161.   Published online 2021 Feb 19
DOI: https://doi.org/10.3365/KJMM.2021.59.3.155

Abstract
In this study, we report a methodology that simultaneously improved the corrosion resistance and visible transparency of ZnO/Cu/ZnO transparent heaters with the addition of reactively sputtered Al2O3 layers. To assess corrosion resistance, ZnO and Al2O3 layers with thicknesses in the range of 0-20 nm were deposited onto 20 nm-thick Cu..... More

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