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Korean J. Met. Mater.
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p/n PbSe 다이오드의 제조 및 전기적 특성 평가
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황보석호, 이제원
Korean J. Met. Mater.
2024;62(2):94-105. Published online 2024 Jan 30
DOI:
https://doi.org/10.3365/KJMM.2024.62.2.94
Abstract
Lead selenide (PbSe) diodes were fabricated using a magnetron sputtering process system with a pulsed DC power supply and a 2-inch PbSe target with a purity of 5N. For p-type PbSe thin films, the process variable was the oxygen ratio in the mixed gas of argon and oxygen. The electrical.....
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Sputtering공정 적용 Ag-Ti 조성경사형 박막의 구조분석
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전용민, 유시홍, 김민준, 이성의
Korean J. Met. Mater.
2023;61(12):909-914. Published online 2023 Nov 30
DOI:
https://doi.org/10.3365/KJMM.2023.61.12.909
Abstract
In this study, a composition-gradient thin film was applied for the formation of intermediate layer of Ti seed layer for an stable electrode stack Ag metal layer. Various composition of Ag-Ti hetero metal layer were simultaneously deposited by using the sputtering process with Ti and Ag target, respectively. An intermediate.....
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DC 마그네트론 스퍼터링에서 입방정 질화붕소 박막의 증착 거동에 미치는 이온 플럭스 변화의 영향
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최영환, 허주열, 백영준
Korean J. Met. Mater.
2023;61(11):824-829. Published online 2023 Oct 29
DOI:
https://doi.org/10.3365/KJMM.2023.61.11.824
Abstract
Cubic boron nitride (cBN) thin films were deposited using DC magnetron sputtering, and the effect of the ion flux on the deposition behavior and residual stress of the cBN thin films was investigated. To increase the ion flux, the magnetic force ratio of the central/peripheral permanent magnets inserted in the.....
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ZnO/Cu/Al
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O
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구조의 유연 투명 면상발열체 연구
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김희창, 최두호
Korean J. Met. Mater.
2023;61(7):480-488. Published online 2023 Jun 21
DOI:
https://doi.org/10.3365/KJMM.2023.61.7.480
Abstract
In this study, we fabricated transparent heaters composed of an ultrathin Cu-layer heating element sandwiched between a ZnO underlayer and an Al
2
O
3
overlayer. With the Cu layer thickness fixed at 8.5 nm, the thicknesses of the ZnO and Al
2
O
3
layers were independently varied to reach the optimum antireflecting condition (maximum.....
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방열판용 구리 후막의 잔류응력 제어를 위한 그래핀 효과에 관한 연구
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배정운
Korean J. Met. Mater.
2023;61(1):28-32. Published online 2022 Dec 28
DOI:
https://doi.org/10.3365/KJMM.2023.61.1.28
Abstract
Nowadays, high-density electronic devices and component mounting have gained popularity. Because of the heat generated from these devices, efficiency of the electronic parts is significantly lowered and life time of these devices is considerably shortened. Therefore, it is very important to efficiently dissipate the heat generated from the device to.....
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조성에 따른 Zn-Ni 합금 박막의 전자파 차폐/흡수 특성 및 부식특성 연구
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임정욱, 김용환, 김연주, 송풍근, 권아람
Korean J. Met. Mater.
2022;60(1):62-67. Published online 2021 Dec 10
DOI:
https://doi.org/10.3365/KJMM.2022.60.1.62
Abstract
In the Fourth industrial age, there is increasing use of electronic devices with high frequency (GHz) operating circuits for radio wave transmission/reception. This can lead to electromagnetic noise, and malfunctions in nearby devices. Electromagnetic shielding technology has emerged as an important way of preventing device malfunctions due to noise, and.....
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Web of Science 2
Crossref 2
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RF sputtering으로 증착된 ZnO 박막을 전자 수송층으로 사용한 양자점 발광 다이오드에 관한 연구
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강명석, 김지완
Korean J. Met. Mater.
2021;59(10):718-723. Published online 2021 Sep 6
DOI:
https://doi.org/10.3365/KJMM.2021.59.10.718
Abstract
We report a highly efficient quantum dot light emitting diode (QLEDs) with a radio frequency (RF) sputtered ZnO thin film as an electron transport layer (ETL) instead of the conventional ZnO nanoparticles (NPs) by solution process. ZnO NPs have been used as a key material to improve the performance of.....
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혼합용매 비율이 투명전극 용 NiTe
2
박막의 박리에 미치는 영향
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이준호, 박호준, 임채은, 김종겸, 구동은, 김석준
Korean J. Met. Mater.
2021;59(7):481-490. Published online 2021 Jun 16
DOI:
https://doi.org/10.3365/KJMM.2021.59.7.481
Abstract
We attempted to maximize the transmittance of 2D NiTe
2
thin film using the liquid-phase exfoliation (LPE) process to confirm the applicability of NiTe
2
as a transparent electrode. The LPE process, using a co-solvent of organic solvent and water, is a stable and efficient method of increasing transmittance at low cost......
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Web of Science 1
Crossref 1
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반응성 스퍼터링법으로 제조된 Al
2
O
3
막을 이용한 ZnO/Cu/ZnO 투명 히터의 내식성과 투과도 개선 연구
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방금혁, 최두호
Korean J. Met. Mater.
2021;59(3):155-161. Published online 2021 Feb 19
DOI:
https://doi.org/10.3365/KJMM.2021.59.3.155
Abstract
In this study, we report a methodology that simultaneously improved the corrosion resistance and visible transparency of ZnO/Cu/ZnO transparent heaters with the addition of reactively sputtered Al
2
O
3
layers. To assess corrosion resistance, ZnO and Al
2
O
3
layers with thicknesses in the range of 0-20 nm were deposited onto 20 nm-thick Cu.....
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Web of Science 4
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Korean J. Met. Mater.
2021;59(3):149-154. Published online 2021 Feb 19
DOI:
https://doi.org/10.3365/KJMM.2021.59.3.149
Abstract
In this study, an effective method is demonstrated for fabricating titanium sputtering targets, which are used to fabricate thin films in the semiconductor industry. The method is an alternative to the existing electron beam melting (EBM) process under high vacuum. Titanium sputtering targets used in the production of semiconductors must.....
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Web of Science 4
Crossref 4
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Korean J. Met. Mater.
2020;58(11):793-797. Published online 2020 Oct 15
DOI:
https://doi.org/10.3365/KJMM.2020.58.11.793
Abstract
Transparent and conductive Ti doped In
2
O
3
(TIO) films were prepared on slide glass substrate using a radio frequency (RF) magnetron sputter and then subjected to Transparent and conductive Ti doped In
2
O
3
(TIO) films were prepared on a glass slide substrate using radio frequency (RF) magnetron sputter. The film surface was.....
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Web of Science 2
Crossref 1
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기판 바이어스와 스퍼터 압력 조절을 통한 저저항 알루미늄 박막 형성 연구
D
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최두호
Korean J. Met. Mater.
2020;58(10):715-720. Published online 2020 Oct 5
DOI:
https://doi.org/10.3365/KJMM.2020.58.10.715
Abstract
In this study, the critical role of substrate bias during the sputter deposition of Al thin films is discussed. Two sets of Al thin films having a nominal thickness of 300 nm were deposited at sputtering pressures of 4.1 and 1.5 mTorr, respectively, with an applied negative substrate bias in.....
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Crossref 1
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후열처리 공정이 스퍼터링법으로 제조된 NiTe
2
박막의 물리적 성질에 미치는 영향
H
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박호준, 이준호, 민병욱, 김석준
Korean J. Met. Mater.
2020;58(3):195-200. Published online 2020 Mar 5
DOI:
https://doi.org/10.3365/KJMM.2020.58.3.195
Abstract
In this study, the effect of post annealing time on the physical properties of NiTe
2
thin films with 2D structure deposited by co-sputtering was investigated. After heat treatment for 10 min, nickel ditelluride thin films with a composition of Ni : Te = 1 : 2 exhibited transmittance of 46%.....
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Web of Science 3
Crossref 3
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Korean J. Met. Mater.
2020;58(3):190-194. Published online 2020 Mar 5
DOI:
https://doi.org/10.3365/KJMM.2020.58.3.190
Abstract
Transparent conductive ZnO 50 nm/Ag 10 nm/SnO
2
50 nm (ZAS) tri-layer films were deposited on glass substrates by magnetron sputtering, and then the surface was subjected to intense electron beam irradiation to investigate the effects of electron irradiation on the structural, optical, and electrical properties of the films. After deposition,.....
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Web of Science 4
Crossref 3
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박막 잔류응력 및 제조공정에 따른 금속박막층 미세크랙 영향
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조병규, 홍승찬, 김병삼, 천재경
Korean J. Met. Mater.
2020;58(3):175-181. Published online 2020 Mar 5
DOI:
https://doi.org/10.3365/KJMM.2020.58.3.175
Abstract
In recent automobile trends, the functions of opening and closing the vehicle door are accomplished by touch sensor and smart-phone NFC (Near Field Communication) systems. These convenience features are incorporated into the outdoor handle. However, this function can’t be used when chrome plating is applied to this part for design.....
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Web of Science 1
Crossref 1
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Korean J. Met. Mater.
2019;57(8):506-509. Published online 2019 Aug 5
DOI:
https://doi.org/10.3365/KJMM.2019.57.8.506
Abstract
ZnO 50 nm/Ag 10 nm/SnO
2
50 nm (ZAS) tri-layer films were deposited on a glass substrate by RF and DC magnetron sputtering and then underwent rapid thermal annealing in a low vacuum of 1×10
-3
Torr to investigate the effects of post-deposition annealing on the optical and electrical properties of the.....
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Web of Science 3
Crossref 3
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Korean J. Met. Mater.
2019;57(7):462-467. Published online 2019 Jun 5
DOI:
https://doi.org/10.3365/KJMM.2019.57.7.462
Abstract
In this work, the angular distribution of the sputtered Cu flux in a long throw sputtering (LTS) system is extracted from the comparison of experimentally-measured profiles of deposited films with simulated profiles of films in overhang contact structure. And effects of the sputtering process parameters such as Ar pressure during.....
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Web of Science 1
Crossref 1
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RF 마그네트론 스퍼터링으로 증착한 산소 결핍 구조 TiO
2-x
박막 트랜지스터에 미치는 급속 열처리 온도의 영향
H
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김한상, 이재윤, 김성진
Korean J. Met. Mater.
2019;57(7):438-446. Published online 2019 Jun 5
DOI:
https://doi.org/10.3365/KJMM.2019.57.7.438
Abstract
We investigated the effect of rapid thermal annealing (RTA) temperature report on oxygendeficient rutile TiO
2-x
thin-film transistors deposited by RF magnetron sputtering. Amorphous TFTs that use TiO
2-x
semiconductors as an active layer can be fabricated by low-temperature process and show remarkable electrical performance. The RTA post-annealing process provides greater production.....
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Web of Science 1
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TiO
2
/TiO
2-x
박막층의 두께가 멤리스터 소자의 특성에 미치는 영향
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김한상, 김성진
Korean J. Met. Mater.
2019;57(2):84-90. Published online 2019 Feb 5
DOI:
https://doi.org/10.3365/KJMM.2019.57.2.84
Abstract
Memristors have been extensively investigated as the fourth fundamental circuit element. Titanium oxide is a common material used to fabricate memristors. In this paper, we investigated the influence of the thickness of the oxide active layer on the Al/TiO2-x/TiO2/heavily doped electrode memristor architecture. An insulating TiO2 thin-film was deposited using.....
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Web of Science 4
Crossref 5
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교번스퍼터링법에 의해 다양한 기지상 재료위에 형성된 Au 나노입자의 성장거동에 대한 전기, 광학적 분석
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김범준, 김현철, 박종건, 이경석
Korean J. Met. Mater.
2017;55(10):739-744. Published online 2017 Sep 28
DOI:
https://doi.org/10.3365/KJMM.2017.55.10.739
Abstract
Nanocomposite films, which are comprised of metal nanoparticles dispersed in a matrix layer, have attracted great interest due to their unique electrical and optical properties, which are mainly due to the excitation of localized surface plasmons. In this study, we employed an alternating sputtering method to fabricate such nanocomposite films......
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Korean J. Met. Mater.
2017;55(8):581-586. Published online 2017 Aug 1
DOI:
https://doi.org/10.3365/KJMM.2017.55.8.581
Abstract
The near-infrared (NIR) reflecting properties of TiO
2
/Ag /TiO
2
(TAT) multilayers deposited using DC/RF magnetron sputtering were investigated. For high transmittance and reflectance in the visible and NIR ranges, respectively, the thickness of each layer was theoretically optimized by the index matching method. As the Ag layer thickness increased, the.....
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Korean J. Met. Mater.
2017;55(3):209-212. Published online 2017 Mar 3
DOI:
https://doi.org/10.3365/KJMM.2017.55.3.209
Abstract
Sn-doped ZnO (ZTO)/Ag/ZTO tri-layer films were deposited on glass substrates by radio frequency (RF) and direct current (DC) magnetron sputtering and then vacuum annealed at 100, 200 and 300 ℃ for 30 min with a proportions of H
2
/N
2
gas flow of 6/6 sccm, to investigate the effects of annealing temperature.....
More
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Korean J. Met. Mater.
2016;54(10):775-779. Published online 2016 Oct 5
DOI:
https://doi.org/10.3365/KJMM.2016.54.10.775
Abstract
Ti-doped In
2
O
3
(TIO) thin films were deposited on glass substrates by RF magnetron sputtering. The films were then annealed at 100, 200 or 300 °C for 30 min to investigate the effects of the annealing temperature on the films’ structural, electrical and optical properties. The films annealed at 200 °C.....
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Crossref 1
Electronic Materials
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Korean J. Met. Mater.
2016;54(8):605-608. Published online 2016 Aug 5
DOI:
https://doi.org/10.3365/KJMM.2016.54.8.605
Abstract
In and Ga doped ZnO (IGZO, 100-nm thick) thin films were deposited by radio frequency magnetron sputtering without intentional substrate heating on a bare glass substrate and a TiO
2
-deposited glass substrate to determine the effect of the thickness of a thin TiO
2
buffer layer on the structural, optical, and electrical.....
More
Crossref 1
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