Korean J. Met. Mater. 2019;57(7):462-467. Published online 2019 Jun 5
DOI:
https://doi.org/10.3365/KJMM.2019.57.7.462
Abstract
In this work, the angular distribution of the sputtered Cu flux in a long throw sputtering (LTS) system is extracted from the comparison of experimentally-measured profiles of deposited films with simulated profiles of films in overhang contact structure. And effects of the sputtering process parameters such as Ar pressure during.....
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