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Thickness Dependence of Cu-layer-based Transparent Heaters
Cu 박막의 두께 변화에 따른 면상발열체 특성 연구
Dooho Choi최두호
Korean J. Met. Mater. 2022;60(7):511-516. Published online 2022 Jun 3 DOI: https://doi.org/10.3365/KJMM.2022.60.7.511
Abstract
In this study, ultrathin (4-40 nm) Cu-layer-based transparent heaters prepared on glass substrates were investigated for cost-effective applications. The Cu heaters were embedded between ZnO layers serving as anti-reflection and anti-corrosion layers. The Cu layer thicknesses varied in the range of 4-40 nm, and the corresponding structural, electrical, optical and..... More
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Enhanced Electrical Performance and Bias Stability of a-IGZO Thin-Film Transistor by Ultrasonicated Pre-annealing
초음파 전열처리를 이용한 a-IGZO 트랜지스터의 향상된 전기적 성능과 바이어스 안정성
Jae-Yun Lee, Suchang Yoo, Han-Lin Zhao, Seong-Gon Choi, Heung Gyoon Ryu, Yong Jin Jeong, Sung-Jin Kim이재윤, 유수창, 조한림, 최성곤, 유흥균, 정용진, 김성진
Korean J. Met. Mater. 2022;60(4):307-314. Published online 2022 Mar 28 DOI: https://doi.org/10.3365/KJMM.2022.60.4.307
Abstract
Vacuum-processed oxide semiconductors have enabled incredible recent advances in the scientific research of metal oxide thin-film transistors (TFTs) and their introduction in commercial displays. Developing metal oxide transistors with low processing temperatures, on the other hand, remains a challenge. Metal oxide transistors are commonly produced at high processing temperatures (over..... More
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Fabrication of Semi-transparent W film Heaters via Phase Transformation
텅스텐 나노박막의 상변태를 이용한 반투명 면상발열체 형성 연구
Jiyun Choi, Dooho Choi최지윤, 최두호
Korean J. Met. Mater. 2021;59(9):664-669. Published online 2021 Aug 4 DOI: https://doi.org/10.3365/KJMM.2021.59.9.664
Abstract
In this study, we prepared highly thermostable semi-transparent heaters composed of W layers with thicknesses of 1-20 nm, on which a 30 nm-thick ZnO layer was deposited to serve as an anti-oxidation barrier. The optical transmittance and sheet resistance of the heaters could be greatly modulated by varying the W..... More
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Deposition of Low-Resistivity Aluminum Thin Films Via Application of Substrate Bias During Magnetron Sputtering
기판 바이어스와 스퍼터 압력 조절을 통한 저저항 알루미늄 박막 형성 연구
Dooho Choi최두호
Korean J. Met. Mater. 2020;58(10):715-720. Published online 2020 Oct 5 DOI: https://doi.org/10.3365/KJMM.2020.58.10.715
Abstract
In this study, the critical role of substrate bias during the sputter deposition of Al thin films is discussed. Two sets of Al thin films having a nominal thickness of 300 nm were deposited at sputtering pressures of 4.1 and 1.5 mTorr, respectively, with an applied negative substrate bias in..... More
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Optimization of ZnO/Cu/ZnO Flexible Transparent Conductive Electrodes Fabricated by Magnetron Sputtering
마그네트론 스퍼터링법으로 제조된 ZnO/Cu/ZnO 유연 투명전극 성능 최적화 연구
Daekyun Kim, Taehyeong Lee, Dooho Choi김대균, 이태형, 최두호
Korean J. Met. Mater. 2019;57(12):795-800. Published online 2019 Nov 22 DOI: https://doi.org/10.3365/KJMM.2019.57.12.795
Abstract
With the expanding development of flexible optoelectronic devices, the need for high-performance (i.e., high conductivity, high transmittance and flexibility) transparent conductive electrodes has grown. In this study, the critical role of thickness for each of the layers in ZnO/Cu/ZnO transparent conductive electrodes (TCE) for optoelectronic devices has been investigated. The..... More
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Effect of Rapid Thermal Annealing Temperature on Oxygen-Deficient TiO<sub>2-x</sub>-based Thin-Film Transistors Deposited by RF Magnetron Sputtering
RF 마그네트론 스퍼터링으로 증착한 산소 결핍 구조 TiO2-x 박막 트랜지스터에 미치는 급속 열처리 온도의 영향
Han-Sang Kim, Jae-Yun Lee, Sung-Jin Kim김한상, 이재윤, 김성진
Korean J. Met. Mater. 2019;57(7):438-446. Published online 2019 Jun 5 DOI: https://doi.org/10.3365/KJMM.2019.57.7.438
Abstract
We investigated the effect of rapid thermal annealing (RTA) temperature report on oxygendeficient rutile TiO 2-x thin-film transistors deposited by RF magnetron sputtering. Amorphous TFTs that use TiO 2-x semiconductors as an active layer can be fabricated by low-temperature process and show remarkable electrical performance. The RTA post-annealing process provides greater production..... More
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Optimization of ZnO/Ag/ZnO Transparent Conductive Electrodes Fabricated by Magnetron Sputtering
스퍼터링법으로 증착된 ZnO/Ag/ZnO 투명전극의 성능 최적화 연구
Woo Hyeon Jo, Dooho Choi조우현, 최두호
Korean J. Met. Mater. 2019;57(2):91-96. Published online 2019 Jan 11 DOI: https://doi.org/10.3365/KJMM.2019.57.2.91
Abstract
The critical role of the thicknesses of the top and bottom oxide layers, as well as Ag layer, in ZnO/Ag/ZnO transparent conductive electrodes were investigated. The Ag forms a nearly continuous layer at the thickness of 8 nm, at which the Ag sheet resistance of 8.0 Ω/Sq. is lower than..... More
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Influence of the Thickness of TiO<sub>2</sub>/TiO<sub>2-x</sub> Layers on the Behavior of a Memristor Device
TiO2/TiO2-x 박막층의 두께가 멤리스터 소자의 특성에 미치는 영향
Han-Sang Kim, Sung-Jin Kim김한상, 김성진
Korean J. Met. Mater. 2019;57(2):84-90. Published online 2019 Feb 5 DOI: https://doi.org/10.3365/KJMM.2019.57.2.84
Abstract
Memristors have been extensively investigated as the fourth fundamental circuit element. Titanium oxide is a common material used to fabricate memristors. In this paper, we investigated the influence of the thickness of the oxide active layer on the Al/TiO2-x/TiO2/heavily doped electrode memristor architecture. An insulating TiO2 thin-film was deposited using..... More
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Study of Solution-Processed Indium Zinc Oxide TFTs Made by Simultaneous Spin Coating and Ultraviolet Light Irradiation
스핀코팅과 자외선 조사의 동시 적용을 기반한 용액 공정형 Indium Zinc 산화물 트랜지스터 연구
Fei Shan, Sung-Jin Kim선비, 김성진
Korean J. Met. Mater. 2017;55(8):572-575. Published online 2017 Aug 1 DOI: https://doi.org/10.3365/KJMM.2017.55.8.572
Abstract
We investigated solution-processed indium zinc oxide (IZO) thin-film transistors (TFTs) which were fabricated by spin coating with simultaneous irradiation by ultraviolet light. The proposed treatment enhanced the efficient condensation and densification of the oxide semiconducting channel layer by decreasing oxygen-vacancy-related defects and increasing metal-oxide bonds. An IZO TFT irradiated for..... More
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High-temperature Corrosion of AlCrTiSiN Film in Ar-1%SO<sub>2</sub> Gas
Poonam Yadav, Sik Chol Kwon, Yue Lin, Shihong Zhang, Dong Bok Lee
Korean J. Met. Mater. 2017;55(4):222-226. Published online 2017 Apr 6 DOI: https://doi.org/10.3365/KJMM.2017.55.4.222
Abstract
An AlCrTiSiN film composed of 31Al-15Cr-1.7Ti-0.5Si-51.8N (at%) was deposited on a steel substrate by arc ion plating to a thickness of 1 μm. It consisted of nano crystalline hcp-AlN and fcc-CrN. Its corrosion behavior in Ar-1%SO 2 gas at 800 ℃ for 5-50 h was studied. The resulting scales consisted primarily..... More
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Enhancement of the Opto-Electrical Properties of Ag Intermediate ZTO Films by Vacuum Annealing
Hyun-Joo Moon, Daeil Kim
Korean J. Met. Mater. 2017;55(3):209-212. Published online 2017 Mar 3 DOI: https://doi.org/10.3365/KJMM.2017.55.3.209
Abstract
Sn-doped ZnO (ZTO)/Ag/ZTO tri-layer films were deposited on glass substrates by radio frequency (RF) and direct current (DC) magnetron sputtering and then vacuum annealed at 100, 200 and 300 ℃ for 30 min with a proportions of H 2/N 2 gas flow of 6/6 sccm, to investigate the effects of annealing temperature..... More
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Material Analysis & Characterization
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Effects of Doping Concentration on the Structural and Optical Properties of Spin-Coated In-doped ZnO Thin Films Grown on Thermally Oxidized ZnO Film/ZnO Buffer Layer/Mica Substrate
Byunggu Kim, Jae-Young Leem
Korean J. Met. Mater. 2017;55(1):67-71. Published online 2017 Jan 5 DOI: https://doi.org/10.3365/KJMM.2017.55.1.67
Abstract
ZnO buffer layers were deposited on mica substrates using a sol-gel spin coating method. Then, a thin film of metallic Zn was deposited onto the ZnO buffer layer/mica substrate using a thermal evaporator, and the deposited Zn thin films were then thermally oxidized in a furnace at 500 ℃ for..... More
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Optical Devices & Energy Materials
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Synthesis and Photoluminescence Studies of ZnO Films Using Vapor Phase Transport Combined With Rapid Heating
Iksoo Ji, Jae-Young Leem
Korean J. Met. Mater. 2016;54(8):609-614. Published online 2016 Aug 5 DOI: https://doi.org/10.3365/KJMM.2016.54.8.609
Abstract
The vapor phase transport (VPT) process is usually used for the growth of one-dimensional nanostructures rather than for film deposition. In this study, for the first time, we report on the fabrication and optical propeties of ZnO film produced by VPT combined with rapid heating. The X-ray diffraction results showed..... More
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Electronic Materials
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Enhanced Optical and Electrical Properties of TiO<sub>2</sub> Buffered IGZO/TiO<sub>2</sub> Bi-Layered Films
Hyun-Joo Moon, Daeil Kim
Korean J. Met. Mater. 2016;54(8):605-608. Published online 2016 Aug 5 DOI: https://doi.org/10.3365/KJMM.2016.54.8.605
Abstract
In and Ga doped ZnO (IGZO, 100-nm thick) thin films were deposited by radio frequency magnetron sputtering without intentional substrate heating on a bare glass substrate and a TiO 2-deposited glass substrate to determine the effect of the thickness of a thin TiO 2 buffer layer on the structural, optical, and electrical..... More
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