Investigation of the Mechanical/Thermal Properties of Nano-Scale Silicon Nitride Membranes
Yong Ju Jang, Hyeon-Jin Shin, Seong Ju Wi, Ha Neul Kim, Gi Sung Lee, Jinho Ahn
Korean J. Met. Mater.. 2019;57(2):124-129.   Published online 2019 Jan 9     DOI: https://doi.org/10.3365/KJMM.2019.57.2.124
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