Effect of Rapid Thermal Annealing Temperature on Oxygen-Deficient TiO2-x-based Thin-Film Transistors Deposited by RF Magnetron Sputtering
Han-Sang Kim, Jae-Yun Lee, Sung-Jin Kim
Korean J. Met. Mater.. 2019;57(7):438-446.   Published online 2019 Jun 5     DOI: https://doi.org/10.3365/KJMM.2019.57.7.438
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