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Korean Journal of Metals and Materials > Volume 56(5); 2018 > Article
Korean Journal of Metals and Materials 2018;56(5): 400-405. doi: https://doi.org/10.3365/KJMM.2018.56.5.400
A Study of Silicon Crystallization Dependence upon Silicon Thickness in Aluminum-induced Crystallization Process
Doo Won Lee, Muhammad Fahad Bhopal, Soo Hong Lee
Green Strategic Energy Research Institute, Department of Electronics Engineering, Sejong University, Seoul 05006, Republic of Korea
Correspondence  Soo Hong Lee ,Tel: +82-2-3408-3726, Email: shl@sejong.ac.kr
Received: 19 February 2018;  Accepted: 16 March 2018.  Published online: 8 May 2018.
Aluminum-induced crystallization(AIC) is one of the ways to improve characteristics of thin-film poly-crystalline (TFPC) silicon solar cell since it shows large grain size and good properties for TFPC silicon solar cell. In AIC process, aluminum is firstly deposited on foreign substrate. Then, silicon is deposited on aluminum. Annealing was done below the eutectic temperature of aluminum and silicon(577 oC). Afterward, amorphous silicon layer is crystallized by aluminum-inducing process. In this paper, we report amorphous silicon layer thickness effects to crystallized silicon and hillock characteristics since the amorphous silicon layer is important layer for AIC.Crystallized silicon properties were analyzed dependent upon silicon thickness (50 % - 200 % than aluminum layer thickness). In case of the thick amorphous silicon (above 300 nm), hillocks grew on the crystallized silicon layer, Even though silicon hillock showed high crystallinity as a result of Raman spectroscopy, it had not enough grain size (average 4 μm). Therefore, as results, samples which had 113 % - 120 % silicon and aluminum thickness ratio showed proper thickness to use as a seed layer.
Keywords: crystallization, solar cells, silicon
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