Korean J. Met. Mater. 2020;58(2):145-150. Published online 2020 Jan 8
DOI:
https://doi.org/10.3365/KJMM.2020.58.2.145
Abstract
The nanofabrication of modern electronic devices requires advanced nanopatterning technologies. To fabricate desirable nanodevices with excellent device performance, controlling the shape and dimension of the pattern is very important. However, to achieve more facile and faster device fabrication, with better pattern resolution, pattern-tunability, process simplicity, and cost-effectiveness, some remaining challenges.....
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