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Fabrication of Semi-transparent W film Heaters via Phase Transformation
텅스텐 나노박막의 상변태를 이용한 반투명 면상발열체 형성 연구
Jiyun Choi, Dooho Choi
최지윤, 최두호
Korean J. Met. Mater. 2021;59(9):664-669.   Published online 2021 Aug 4
DOI: https://doi.org/10.3365/KJMM.2021.59.9.664

Abstract
In this study, we prepared highly thermostable semi-transparent heaters composed of W layers with thicknesses of 1-20 nm, on which a 30 nm-thick ZnO layer was deposited to serve as an anti-oxidation barrier. The optical transmittance and sheet resistance of the heaters could be greatly modulated by varying the W..... More

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