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Effects of Electron Irradiation on the Properties of ZnO/Au/ZnO Films Deposited on Poly-Imide Substrates
Jin-Kyu Jang, Yun-Je Park, Yeon-Hak Lee, Jae-Wook Choi, Hyun-Jin Kim, Sung-Bo Heo, Young-Min Kong, Daeil Kim장진규, 박윤제, 이연학, 최재욱, 김현진, 허성보, 공영민, 김대일
Korean J. Met. Mater. 2022;60(9):668-672. Published online 2022 Aug 30 DOI: https://doi.org/10.3365/KJMM.2022.60.9.668
Abstract
Transparent and conductive ZnO 50 nm/Au 8 nm/ZnO 50 nm tri-layer films were deposited on poly-imide films by radio frequency (RF) and direct current (DC) magnetron sputtering at room temperature, and then the effect of electron irradiation on the crystallization, electrical resistivity and optical properties of the films was considered..... More
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